Imaging Modes
TEM
- Resolving power:
- 2.5 nm
- Total magnification:
- 1,500-150,000 ×
STEM
- Resolving power:
- 2.0 nm
- Min. magnification:
- 6,000 ×
(25 × 25 µm)
ED (Electron Diffraction)
- Minimum probe size:
- 100 nm
- Diffraction lens:
- 3.5 × magnification
SEM
- Resolving power:
- 4.0 nm
- Min. magnification:
- 800 ×
(200 × 200 µm)
- Back scattered electron detector (BSE)
Electron Optics
Electron Gun
- Field emission gun
- SE cathode ZrO/W[100]
- Over 2,000 hours lifetime
- αth = 0.2 mA sr-1
(theoretical aperture angle)
Objective Lens
- Permanent Magnet
- f = 1.26 mm
(focal length)
- Cs = 0.64 mm
(spherical aberation coefficiant)
- Cs = 0.89 mm
(chromatic aberation coefficiant)
- δth = 1.1 nm
(theoretical resolution)
- αth = 10-2rad
(theoretical aperture)
- Condensor apertures: ∅ 50 and 30 µm
Condensor Lens
- Permanent Magnet
- f = 4.3 mm
(focal length at 5 kV)
- Smallest illumination area: 100 nm
- Condensor apertures: ∅ 50 and 30 µm
Projection Lens
- Electrostatic
- Magnification on YAG screen: 36-470 ×
Vacuum
Airlock System
- Diaphragmal and turbomolecular pump (10-5 mbar)
Object Space
- Ion getter pump (10 l s-1, 10-8 mbar)
Electron Gun
- Ion getter pump (10 l s-1, 10-9 mbar)
Size and Weight
Electron and Light Optic System
- Weight:
- 25 kg
- Width:
- 290 mm
- Depth:
- 450 mm
- Height:
- 430/480 mm
Airlock Pumping System
- Weight:
- 15 kg
- Width:
- 300 mm
- Depth:
- 300 mm
- Height:
- 340 mm
Control Electronics
- Weight:
- 19 kg
- Width:
- 470 mm
- Depth:
- 270 mm
- Height:
- 290 mm
Consumption
Control electronics
- Stand-by:
- 20 W
(ion pumps only)
- Operating:
- 160 W
Other components
- Airlock pump:
- 300 W
- Camera:
- 24 W
- PC and monitor:
- 450W
