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State-of-the-Art Instruments for Advanced Materials Science and Semiconductor Defect Inspection

Attolight’s unique knowledge in combined electron and light spectroscopy empowers researchers to gain new insights in materials science and to tackle the semiconductor industry’s advanced process development challenges at and beyond the nanoscale.
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Equipment

Our Advanced Equipment Lineup

Discover our high-performance cathodoluminescence solutions, engineered for exceptional materials characterization. Our range includes versatile multi-spectroscopic CL SEM platforms, CL STEM add-ons and automated wafer CL SEM systems, delivering unparalleled precision and adaptability to meet all your materials inspection requirements.

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Technology

About Cathodoluminescence

Attolight revolutionizes cathodoluminescence analysis with its innovative optical collection design, seamlessly integrated into a SEM column. This advanced system enables precise quantitative analysis and enhances the charaterization of any materials, thanks to its highly efficient photon collection.

Elevate your research and quality control standards with Attolight’s cutting-edge technology!

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Trusted by top semiconductor companies and prestigious research institutes worldwide

Applications

Innovative Applications of Cathodoluminescence Technology

Pushing the boundaries of material characterization.

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Power Electronics
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Quantum technologies
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Sensors
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Life sciences
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Energy Materials
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RF / power transistors
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Optoeletronics
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Application

Correlating structural and optical properties of lead halide perovskites

We will introduce CL-STEM as a complementary technique to other in-STEM characterization methods for identifying the physical origin of lead halide perovskite optical properties.
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Non-destructive control of epitaxial layer uniformity in GaN power devices

We will show how spectrally-resolved quantitative CL can address this challenge
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Application

Comprehensive defect review and classification for SiC

We show how spectrally-resolved quantitative CL can be used to classify various defects in SiC
Latest

Stay informed with our latest developments and events

Stay informed with the latest developments, breakthroughs, and insights.

Meet Tokyo Instrument at SEMICON Japan (Dec 11-13; Tokyo)

Tokyo Instrument Inc., the exclusive representative of Attolight in Japan, will showcase cutting-edge SEM-CL and STEM-CL analytical tools at Semicon Japan 2024 from December 11–13 in Tokyo.

Join us at the MRS Fall Meeting & Exhibit 2024 in Boston!

Attolight will participate in the MRS Fall Meeting & Exhibition 2024 in Boston, MA. Visit us at Booth #416 and attend our talk by Nick Morgan "Towards µm-Sized Laser Spots in a TEM" on Monday, 4:15pm.

Attolight joins the new ALL2GaN

Attolight has recently joined the new ALL2GaN project aiming at supporting the European Green Deal challenge.

Ready to revolutionize your materials characterization approach?

Get in touch with us today to discover how our state-of-the-art cathodoluminescence tools can elevate your research and industry applications.
Already more than 30 systems installed globally!
About

Establishing Cathodoluminescence as a standard inspection method

We are committed to delivering state-of-the-art solutions that provide unparalleled precision, speed, and ease-of-use, enabling our customers to drive performance and innovation in the semiconductor industry and beyond.

By establishing cathodoluminescence as a standard characterization technique, we strive to empower researchers, manufacturers, and industry leaders worldwide.

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